DEVELOPMENT OF HIGH PRECISION PNEUMATIC-PIEZOELECTRIC HYBRID POSITIONING SYSTEM
نویسندگان
چکیده
منابع مشابه
Pneumatic Positioning System for Precision Assembly
Micro assembly is typically characterised by positioning tolerances below a few micrometers. In the case of a hybrid micro system assembly, such as optical glass fibres, micro ball lenses or micro probes for measurement tasks, even positioning accuracies in the sub-micrometer range have to be achieved. Due to the need for highly accurate assembly systems and extensive alignment procedures the a...
متن کاملAdaptive Robust Precision Control of Piezoelectric Positioning Stages
Positioning stages using piezoelectric stack actuator (PEA) have very high theoretical bandwidth and resolution. However, as the total length of travel increases, nonlinear dynamics due to inherent hysteresis starts to dominate. In this paper, we separate the fast and slow dynamics of the total displacement and propose a simple first-order model. By approximating the hysteresis mapping with sim...
متن کاملDevelopment of Ultra Precision Machining with High Positioning Resolution
INSTRUCTIONS The technology for ultra-precision machining has been developed rapidly and steadily. In recent years, the demand for free form, complex and microscopic cutting has increased as a result of the need for highvalue-added fabrication for items such as high NA glass lenses, micro-grooves, diffractive aspheric lenses and other optical components. The ultra-precision machine for cutting ...
متن کاملModelling and Identification of a High-precision Planar Positioning System
This contribution is dedicated to developing a thorough physical model of a high-precision planar positioning system. Subject of this investigation is Tetra’s state-of-the-art high-precision planar positioning system “PPS200” using air bearings and electromagnetic coupling as a principle of propulsion. We develop physical models of all components and investigate the influence of various physica...
متن کاملControl of a long range high-precision positioning system
Among a variety of actuators, Lorentz actuators are often used as fine actuators in DSA systems under an environment where disturbances are expected at fine actuators’ base. Their advantage is that they show an almost ideal zero stiffness characteristics, which is that disturbances from bases do not transmit to the moving parts [1]. Such zero-stiffness DSA systems have been applied to wafer sca...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Proceedings of the JFPS International Symposium on Fluid Power
سال: 2002
ISSN: 2185-6303
DOI: 10.5739/isfp.2002.687